Recent advances in use of atomic layer deposition and focused ion beams for fabrication of Fresnel zone plates for hard x-rays

Keskinbora, KahramanKahramanKeskinboraRobisch, Anna-LenaAnna-LenaRobischMayer, MarcelMarcelMayerGrévent, CorinneCorinneGréventSzeghalmi, Adriana V.Adriana V.SzeghalmiKnez, MatoMatoKnezWeigand, MarkusMarkusWeigandSnigireva, IrinaIrinaSnigirevaSnigirev, AnatolyAnatolySnigirevSalditt, TimTimSaldittSchütz, GiselaGiselaSchütz2017-09-072017-09-072013-09-26https://resolver.sub.uni-goettingen.de/purl?gro-2/2815enRecent advances in use of atomic layer deposition and focused ion beams for fabrication of Fresnel zone plates for hard x-raysconference_paper10.1117/12.20272513145114x-ray optics