Erhard, KlausKlausErhardLuke, D. RussellD. RussellLukePotthast, RolandRolandPotthast2023-02-022023-02-022002-04https://resolver.sub.uni-goettingen.de/purl?gro-2/121179An Integration of Ellipsometry into Inverse Rough Surface Scatteringotherfor Nannofilm, GmBH