Hard real time control software for use in electron beam lithography with an emphasis on patterns with radial symmetry

Heim, S.S.HeimRudolph, S.S.RudolphRudolph, D.D.RudolphSchmahl, G.G.Schmahl2018-11-072018-11-072003https://resolver.sub.uni-goettingen.de/purl?gro-2/46310In order to overcome the limitations with existing electron beam lithography control systems a complete beam control software system has been implemented from scratch, therefore allowing for optimizations especially for patterns with radial symmetry during each stage of the deployment process.Hard real time control software for use in electron beam lithography with an emphasis on patterns with radial symmetryconference_paper10.1051/jp4:200300060000183273900047