Fabrication of Periodic Nanostructures on Silicon Suboxide Films with Plasmonic Near-Field Ablation Induced by Low-Fluence Femtosecond Laser Pulses

Takaya, TatsuyoshiTatsuyoshiTakayaMiyaji, GodaiGodaiMiyajiTakahashi, IsseiIsseiTakahashiRichter, Lukas JanosLukas JanosRichterIhlemann, JürgenJürgenIhlemann2021-04-142021-04-142020https://resolver.sub.uni-goettingen.de/purl?gro-2/81037enFabrication of Periodic Nanostructures on Silicon Suboxide Films with Plasmonic Near-Field Ablation Induced by Low-Fluence Femtosecond Laser Pulsesjournal_article10.3390/nano10081495