Interface roughness in sputtered W/Si multilayers and related growth models

Salditt, TimTimSaldittMetzger, Till HartmutTill HartmutMetzgerLott, DDLottPeisl, J.J.Peisl2020-03-112020-03-111996https://resolver.sub.uni-goettingen.de/purl?gro-2/63301enInterface roughness in sputtered W/Si multilayers and related growth modelsjournal_article10.1107/S0108767396080981