Surface kinetics during growth and ion irradiation of glassy metal films

Abstract

The surface kinetics during co-deposition or MeV ion-beam irradiation of amorphous metal films leads to the formation of mesoscopic structures and intrinsic mechanical stresses through a complex interplay between different atomic processes. These processes are investigated using a combination of experiments, numerical analyses, and molecular dynamics computer simulations. (C) 2003 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.